Abstract
Thermally evaporated ZnSe thin films deposited on glass substrates within substrate temperatures (T s)at 303 K-623 K are of polycrystalline nature having f.c.c. zincblende structure. The most preferential orientation is along [111] direction for all deposited films together with other abundant planes [220] and [311]. The lattice parameter, grain size, average internal stress, microstrain, dislocation density and degree of preferred orientation in the film are calculated and correlated with T s.
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Kalita, P.K., Sarma, B.K. & Das, H.L. Structural characterization of vacuum evaporated ZnSe thin films. Bull Mater Sci 23, 313–317 (2000). https://doi.org/10.1007/BF02720089
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DOI: https://doi.org/10.1007/BF02720089