Abstract
Barium and strontium titanate films were electrochemically synthesized onto Ti thin film prepared by RF sputtering. Applied current waveform was modulated to investigate the film growth mechanism. Superimposed cathodic pulses accelerated the formation of titanate thin films, and both the electrode surface pH and (Ba2+, Sr2+) ion size had a strong influence on film formation. Titanate film formation mechanism was investigated with a scanning electron microscope, an X-ray diffractometer and an electrochemical quartz crystal microbalance (EQCM).Insitu mass change of Ti electrode during electrolysis indicated that electrochemical method sets a limit to film growth.
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References
Bacsa, R. R., Rutsch, G. and Dougherty, J. P.,“Electrochemical Synthesis of Barium Titanate Thin Films,”J. Mater. Res.,11, 194 (1996).
Bard, A. J. and Faulkner, L. R.,“Electrochemical Methods: Fundamentals and Applications,” John Wiley & Sons, 700 (1980).
Baumert, B. A., Chang, L.-H., Matsuda, A. T. and Tracy, C. J.,“A Study of Barium Strontium Titanate Thin Films for Use in Bypass Capacitors,”J. Mater. Res.,13, 197 (1998).
Bendale, P., Venigalla, S., Ambrose, J. R., Verink, E. D. and Adair, J. H., “Preparation of Barium Titanate Films at 55 ‡C by an Electrochemical Method,”J. Am. Ceram. Soc.,76, 2619 (1996).
Hoffmann, T, Doll, T. and Fuenzalida, V. M.,“Fabrication of BaTiO3 Microstructures by Hydrothermal Growth,”J. Electrochem. Soc.,144, L292 (1997).
Hori, Y. and Suzuki, S.,“Electrolytic Reduction of Bicarbonate Ion at a Mercury Electrode,”J. Electrochem. Soc.,130, 2390 (1983).
Kajiyoshi, K., Hamaji, Y., Tomono, K., Kasanami, T. and Yoshimura, M.,“Microstructure of Strontium Titanate Thin Film Grown by the Hydrothermal-Electrochemical Method,”J. Am. Ceram. Soc.,79, 613 (1996).
Kajiyoshi, K., Tomono, K., Hamaji, Y., Kasanami, T. and Yoshimura, M.,“Short-Circuit Diffusion of Ba, Sr, and O during ATiO3 (A=Ba, Sr) Thin-film Growth by the Hydrothermal-Electrochemical Method,”J. Am. Ceram. Soc.,78, 1521 (1995).
Kajiyoshi, K., Yoshimura, M., Hamaji, Y., Tomono, K. and Kasanami, T.,“Growth of (Ba, Sr)TiO3 Thin Films by the Hydrothermal-Electrochemical Method and Effect of Oxygen Evolution on Their Microstructure,”J. Mater. Res.,11, 169 (1996).
Othsuka, T, Masuda, M. and Sato, N.,“Ellipsometric Study of Anodic Oxide Films on Titanium in Hydrochloric Acid, Sulfuric Acid, and Phosphate Solution,”J. Electrochem. Soc.,132, 787 (1985).
Pasierb, P., Komornicki, S. and Radecka, M.,“Structural and Optical Properties of Sr1-xBaxTiO3 Thin Film Prepared by RF Sputtering,”Thin Solid Films,324, 134 (1998).
Schaffer, J. P., Saxena, A., Antolovich, S. D., Sanders, T. H. Jr. and Warner, S. B.,“The Science and Design of Engineering Materials,” Richard D. Irwin, Inc., Chicago (1995).
Seo, K. W. and Kong, H. G.,“Hydrothermal Preparation of BaTiO3 Thin Films,”Korean J. Chem. Eng.,17, 428 (2000).
Seo, K. W. and Kong, H. G.,“Low-Temperature Preparation of Hydrothermal and Lead Zirconate Titanate Thin Films,”Korean J. Chem. Eng.,17, 455 (2000).
Takeshima, Y., Shiratsuyu, K., Takagi, H. and Sakabe, Y.,“Preparation and Dielectric Properties of the Multilayer Capacitor with (Ba, Sr)-TiO3 Thin Layers by Metalorganic Chemical Vapor Deposition,”Jpn. J. Appl. Phys.,36, 5870 (1997).
Tsuzuki, A., Kato, K., Kusumoto, K. and Torii, Y.,“Preparation and Characterization of (Ba1-xSrxTiO3 Films by Sol-Gel Processing,”J. Mater. Sci.,33, 3055 (1998).
Venigalla, S., Bendale, P. and Adair, J. H.,“Low Temperature Electrochemical Synthesis and Dielectic Characterization of Barium Titanate Films Using Nonalkali Electrolytes,”J. Electrochem. Soc.,142, 2101 (1995).
Xu, W.-P., Zheng, L., Xin, H. and Lin, C.,“Formation of BaTiO3 and PbTiO3 Thin Films under Mild Hydrothermal Conditions,”J. Mater. Res.,11, 821 (1996).
Yoshimura, M., Suchanek, W., Watanabe, T. and Sakurai, B.,“Functionally Graded SrTiO3-BaTiO3 Thin Films Prepared by the Hydrothermal-Electrochemical Method under Flowing Solution,”J. Mater. Res.,13, 875 (1998).
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Kim, J.H., Kang, J., Kim, GJ. et al. Electrochemical synthesis of ba- and Sr-based titanate thin films using Ti electrode prepared by RF sputtering. Korean J. Chem. Eng. 18, 297–302 (2001). https://doi.org/10.1007/BF02699168
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DOI: https://doi.org/10.1007/BF02699168