Abstract
Special features of the application of a mass spectroscopic method to analysis of ionized components of the plasma of a vacuum-arc discharge are discussed. The intensities of N+, O +2 , Ar+, TiN+, and TiO+ ions as functions of the pressure of the corresponding neutral gas and the magnitude of the magnetic-field strength on the cathode surface are measured. The average energy of the N+ and TiN+ ions as measured with an electrostatic probe is equal to ≈25 eV. The number of the N+, O+, TiN+, and TiO+ ions that emerge on the cathode and propagate in the direction of the substrate is tenths of a percent of the number of metal ions, which confirms the mechanism of reactive vacuum-arc coating forming directly on the substrate.
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Physico-Technical Institute Academy of Sciences of Belarus, 4, Zhodinskaya St., Minsk, 220730. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 5, pp. 674–678, September–October, 1997.
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Golubev, V.S., Romanchuk, I.A. Mass spectroscopic investigation of ionized compenents of vacuum-arc discharge plasma. J Appl Spectrosc 64, 689–693 (1997). https://doi.org/10.1007/BF02675335
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DOI: https://doi.org/10.1007/BF02675335