Abstract
We have grown nominally undoped ZnSe on GaAs from the precursors H2Se and Et2Zn. Replacement of Et2Zn by Zn[N(TMS)2]2 produced crystalline ZnSe of a lesser quality. Data indicate incorporation of nitrogen into the films when Et2Zn is utilized as the main zinc source with Zn[N(TMS)2]2 being introduced at dopant levels. Characterization techniques employed include NMR, XRD, SIMS, SEM, PL, RGA, GC/MS, and Raman spectroscopy.
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K. Nakanishi, I. Suemune, Y. Fujii, Y. Kuroda and M. Yamanishi, Appl. Phys. Lett.59, 1401 (1991).
C. A. Zmudzinski, Y. Guan and P. S. Zory, IEEE Photon. Technol. Lett.2, 94 (1990).
M. A. Haase, J. Qiu, J. M. DePuydt and H. Cheng, accepted for publication Appl. Phys. Lett. (1991).
M. A. Haase, H. Cheng, J. M. DePuydt and J. E. Potts, J. Appl. Phys.67, 448 (1990).
K. Akimoto, T. Miyajima and Y. Mori, Jpn. J. Appl. Phys.28, L531 (1989).
R. M. Park, M. B. Troffer, C. M. Rouleau, J. M. DePuydt and M. A. Haase, Appl. Phys. Lett.57, 2127 (1990).
T. Yasuda, I. Mitsuishi and H. Kukimoto, Appl. Phys. Lett.52, 57 (1988).
A. Yoshikawa, S. Muto, S. Yamaga and S. Kasi, Jpn. J. Appl. Phys.27, L260 (1988).
A. Yahata, H. Mitsuhashi, K. Hirahara and T. Beppu, Jpn. J. Appl. Phys.29, L4 (1990).
W. Stutius, J. Cryst. Growth.59, 1 (1982).
A. Ohki, N. Shibita, K. Ando and A. Katsui, J. Cryst. Growth93, 692 (1988).
A. Ohki, N. Shibata and S. Zambutsu, Jpn. J. Appl. Phys.27, L909 (1988).
A. Yoshikawa, S. Muto, S. Yamaga and H. Kasai, J. Cryst. Growth86, 279 (1988).
A. Yoshikawa, S. Muto, S. Yamaga and H. Kasai, Jpn. J. Appl. Phys.27, 992 (1988).
I. Suemune, K. Yamada, H. Masato, T. Kando, Y. Kan and M. Yamanishi, Jpn J. Appl. Phys.27, L2195 (1988).
A. Taike, M. Migita and H. Yamamoto, Appl. Phys. Lett.56, 1989 (1990).
M. Migita, A. Taike and H. Yamamoto, J. Appl. Phys.68, 880 (1990).
S. J. C. Irvine, Crit. Rev. Solid State Mat. Sci.13, 279 (1987).
T. Yao, Jpn. J. Appl. Phys.25, L942 (1986).
T. Yao, Jpn. J. Appl. Phys.25, L544 (1986).
T. Yao, T. Takeda and R. Watanuki, Appl. Phys. Lett.48, 1615 (1986).
N. Shibata, A. Ohki, S. Zembatsa and A. Katsui, Jpn. J. Appl. Phys.27, L441 (1988).
N. Shibata, A. Ohki, H. Wakanishi and S. Zembatsu, J. Cryst. Growth86, 268 (1988).
K. Okamoto, N. Itoh, H. Ogawa, T. Kawabata and S. Koike, Jpn. J. Appl. Phys.27, L756 (1988).
N. Itoh, K. Okamoto, H. Ogawa, T. Kawabata and S. Koike, Appl. Surf. Sci.34/35, 413 (1988).
T. Yodo, T. Koyama and K. Tamashita, J. Cryst. Growth 86, 273 (1988).
T. Yodo, T. Koyama, H. Ueda and K. Yamashita, J. Appl. Phys.65, 2728 (1989).
T. Yodo, T. Koyama and K. Yamashita, J. Cryst. Growth92, 196 (1988).
J. E. Huheey in “Inorganic Chemistry,” 2nd Ed., Harper and Row: New York (1978).
H. Burger, D. Sawodny and W. Wannagat, J. Organomet. Chem.3, 113 (1965).
M. F. Lappert, P. P. Power, A. R. Sanger and R. C. Srivastava in “Metal and Metalloid Amides: Syntheses, Structures, and Physical and Chemical Properties,” Ellis Horwood: Chichester, England (1980).
A. Haaland, K. Hedberg and P. P. Power, Inorg. Chem.23, 1972 (1984).
A. Mooradian, in “Laser Handbook,” eds. L. T. Arecchi and E. O. Schultz-Dubois (American Elsevier, New York)2, 1409 (1972).
K. Wan, J. L. Young, R. L. S. Devine, W. T. Moore, A. J. SpringThorpe, C. J. Miner and P. Mandeville, J. Appl. Phys. 63, 5598 (1988).
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Rees, W.S., Green, D.M., Anderson, T.J. et al. Evaluation of Zn{N[Si(CH3)3]2}2 as ap-type dopant in OMVPE growth of ZnSe. J. Electron. Mater. 21, 361–366 (1992). https://doi.org/10.1007/BF02660467
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DOI: https://doi.org/10.1007/BF02660467