Skip to main content
SpringerLink
Log in

Epitaxially regrown GaAs/AlGaAs laser mesas with semi-insulating GaInP:Fe and GaAs:Fe

  • Special Issue Paper
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Selective regrowth of semi-insulating iron-doped Ga0.51In0.49P (SI-GaInP:Fe) and SI-GaAs:Fe around GaAs/AlGaAs mesas by hydride vapor phase epitaxy (HVPE) has been achieved. A HCl based in-situ cleaning procedure has been used to remove aluminum oxide from the etched walls of the mesas. Regrowth conducted without proper cleaning results in an irregular interface with voids. Regrowth morphology aspects are also presented. Our cleaning and regrowth methods have been used for fabricating GaAs/AlGaAs buried heterostructure in-plane lasers and vertical-cavity surface-emitting lasers.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. S. Lourdudoss, O. Kjebon, J. Wallin, and S. Lindgren,IEEE Photon. Technol. Lett. 5, 1119 (1993).

    Google Scholar 

  2. R. Göbel, F. Steinhagen, and H. Janning,Mater. Sci. Eng. B 35, 59 (1995).

    Article  Google Scholar 

  3. O. Kjebon, R. Schatz, S. Lourdudoss, S. Nilsson, and B. Stälnacke,Proc. SPIE 2684 (Bellingham, WA: SPIE, 1996), p. 138.

    Book  Google Scholar 

  4. P. Morton, R.A. Logan, T. Tanbun-Ek, P.F. Sciortinio, Jr., A.M. Sergent, R.K. Montgomery, and B.T. Lee,Electron. Lett. 28, 2156 (1992.

    Article  CAS  Google Scholar 

  5. C.S. Hong, D. Kasemet, M.E. Kim, and R.A. Milano,Electron. Lett. 19, 759 (1983).

    Article  CAS  Google Scholar 

  6. H. Narui and D. Imanishi,Electron. Lett. 32, 664 (1996).

    Article  CAS  Google Scholar 

  7. S. Lourdudoss, R. Holtz, O. Kjebon, and G. Landgren,J. Cryst. Growth 154, 410 (1995).

    Article  CAS  Google Scholar 

  8. B.-S. Yoo, H.Y. Chu, H.-H. Park, H.G. Lee and J. Lee,IEEE J. Quant. Electron. 33, 1794 (1997).

    Article  CAS  Google Scholar 

  9. S. Lourdudoss, E. Rodriguez Messmer, O. Kjebon, K. Streubel, J. André, and G. Landgren,Mater. Sci. Eng. B28, 179 (1994).

    Article  CAS  Google Scholar 

  10. J.C. Bailar, H.J. Emeléus, R. Nyholm, and A.F. Trotman-Dickenson,Comprehensive Inorganic Chemistry, vol. 1 (Oxford, U.K.: Pergamon Press, 1973), p. 1032.

    Google Scholar 

  11. D.A. Allwood, R.T. Carline, N.J. Mason, C. Pickering, B.K. Tanner, and P.J. Walker,Thin Solid Films 364, 33 (2000).

    Article  CAS  Google Scholar 

  12. E. rodriguez Messmer, T. Lindström, and S. Lourdudoss,J. Cryst. Growth 210, 600 (2000).

    Article  Google Scholar 

  13. C. Angulo Barrios, E. Rodriguez Messmer, M. Holmgren, and S. Lourdudoss,Electrochem. Solid-State Lett. 3, 439 (2000).

    Article  Google Scholar 

  14. C. Angulo Barrios, E. Rodriguez Messmer, M. Risberg, C. Carlsson, J. Halonen, M. Ghisoni, A. Larsson, and S. Lourdudoss,Electron. Lett. 36, 1542 (2000).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electronics, Laboratory of Semiconductor Materials, Royal Institute of Technology, KTH-Electrum 229, S-164 40, Kista, Sweden

    C. Angulo Barrios, E. Rodriguez Messmer & S. Lourdudoss

  2. Spectra Precision AB, Rinkebyv. 17, Box 64, S-182 11, Danderyd, Sweden

    M. Holmgren

  3. Optoelectronic BU, Mitel Semiconductor AB, Box 520, S-175 26, Järfälla, Sweden

    A. Risberg

  4. Department of Microelectronics ED, Photonics Laboratory, Chalmers University of Technology, S-412 96, Göteborg, Sweden

    J. Halonen

Authors
  1. C. Angulo Barrios
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. Rodriguez Messmer
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Holmgren
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Risberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. Halonen
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. S. Lourdudoss
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Angulo Barrios, C., Rodriguez Messmer, E., Holmgren, M. et al. Epitaxially regrown GaAs/AlGaAs laser mesas with semi-insulating GaInP:Fe and GaAs:Fe. J. Electron. Mater. 30, 987–991 (2001). https://doi.org/10.1007/BF02657722

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02657722

Key words

Search

Navigation