Skip to main content
Log in

Specific contact resistivity of indium contacts to n-type CdTe

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Indium alloyed to n-type CdTe of about 1016 cm-3 electron concentration provides a contact resistivity of about 7 x 10-3 ohm cm2. This is achieved by alloying for 10 minutes at 150-450‡C in a sealed ampoule with an overpressure of cadmium. If the alloying is done in an open tube H2 flow without a Cd vapor overpressure, alloying temperatures above 250‡C cause the contact resistance to rise as cadmium vacancies increase the compensation in the CdTe. Further improvement of the contact resistivity to 1 x 10-3 ohm cm is obtained by a 900‡C diffusion of In into the n-CdTe (electron concentration 1016 cm-3 before the diffusion).

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. T. C. Anthony, A. L. Fahrenbruch, and R. H. Bube, J. Electron. Mater,11, 89 (1982).

    CAS  Google Scholar 

  2. H. Tews and C. An, J. Appl. Phys. 53, 5339 (1982).

    Article  CAS  Google Scholar 

  3. A. Musa, J. P. Ponpon, J. J. Grob, M. Hage-Ali, R. Stuck and P. Siffert, J. Appl. Phys.54, 3260 (1983).

    Article  CAS  Google Scholar 

  4. C.-T. Lee and R. H. Bube, J. Appl. Phys. 54, 7041 (1983).

    Article  CAS  Google Scholar 

  5. J. Gu, T. Kitahara, K. Kawakam and T. Sakaguchi, J. Appl. Phys.46, 1184 (1975).

    Article  CAS  Google Scholar 

  6. E. Janik and R. Triboulet, J. Phys. D.16, 2333 (1983).

    Article  CAS  Google Scholar 

  7. R. E. Braithwaite, C. G. Scott, and J. B. Mullin, Solid-State Electron.23, 1091 (1980).

    Article  CAS  Google Scholar 

  8. D. DeNobel, “Method of making electrical connection to semiconductive selenide or telluride,” U.S. Patent Office, 2865793 (1958).

  9. P. Gaugash and A. G. Milnes, J. Electrochem. Soc.128, 924 (1981).

    Article  CAS  Google Scholar 

  10. M. H. Patterson and R. H. Williams, J. Phys. D.11, L83 (1978).

    Article  CAS  Google Scholar 

  11. L. C. Isett and P. K. Raychaudhuri, J. Appl. Phys.55, 3605–3612 (1984).

    Article  CAS  Google Scholar 

  12. A. L. Fahrenbruch and R. H. Bube,Fundamentals of Solar Cells, Academic Press, NY (1983).

    Google Scholar 

  13. K. Heime, U. Konig, E. Kohn and A. Wortmann, Solid-State Electron. 17, 835 (1974).

    Article  CAS  Google Scholar 

  14. H. M. Macksey, “Ohmic contacts for GaAs power FETs”,GaAs and Related Compounds (St. Louis), Inst. of Phys., London, 254 (1976).

    Google Scholar 

  15. E. Watson and D. Shaw, J. Phys. C16, 515 (1983).

    Article  CAS  Google Scholar 

  16. F. A. Kroger, J. Phys. Chem. Solids26, 1717 (1965).

    Article  Google Scholar 

  17. G. Mandel, Phys. Rev.134, A1073 (1964).

    Article  Google Scholar 

  18. P. Hoschl and S. Kubalkova, Czech. S. Phys.B22, 530 (1972).

    Article  Google Scholar 

  19. T. Ambridge and M. M. Faktor, J. Applied Electrochemistry4, 135(1974).

    Article  CAS  Google Scholar 

  20. T. Ambridge, C. R. Elliott, and M. M. Faktor, J. Applied Electrochemistry3, 1 (1973).

    Article  CAS  Google Scholar 

  21. T. Ambridge and M. M. Faktor, J. Applied Electrochemistry5, 319 (1975).

    Article  Google Scholar 

  22. T. Ambridge and M. M. Faktor, “An electrochemical technique for automatic depth profiles of carrier concentration”, Inst. Phys. Conf. Ser. No. 24, 320 (1975).

    CAS  Google Scholar 

  23. A. Z. Li and A. G. Milnes, J. Crystal Growth62, 95 (1983).

    Article  CAS  Google Scholar 

  24. The Polaron Semiconductor Profile Plotter Operating Manual, Bio-Rad Laboratories, Richmond, CA 94804.

  25. Mirrolite GaAs Polishing Compound, Material Development Corporation, Santa Monica, CA 90401.

  26. M. Hage-Ali, R. Stuck, A. N. Saxena and P. Siffert, Appl. Phys.19, 25 (1979).

    Article  CAS  Google Scholar 

  27. J. G. Werthen, J. P. Haring, A. L. Fahrenbruch and R. H. Bube, J. Appl. Phys.54(10), 5982 (1983).

    Article  CAS  Google Scholar 

  28. J. G. Werthen, J. P. Haring, A. L. Fahrenbruch, R. H. Bube, J. Phys. D. 16, 2391 (1983).

    Article  CAS  Google Scholar 

  29. J. P. Haring, J. G. Werthen, and R. H. Bube, J. Vac. Sci. Technol.Al(3), 1469 (1983).

    Google Scholar 

  30. C. A. Mead and W. G. Spitzer, Phys. Rev. 134, A713 (1964).

    Article  Google Scholar 

  31. M. H. Patterson and R. H. Williams, J. Crystal Growth,59, 281 (1984).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Nozaki, S., Milnes, A.G. Specific contact resistivity of indium contacts to n-type CdTe. J. Electron. Mater. 14, 137–155 (1985). https://doi.org/10.1007/BF02656672

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02656672

Key words

Navigation