Abstract
Three basic cases of LPE growth with and without nucleation were examined. The nucleation was shown to take place at critical values of the solution supersaturation. Based on the parameters of initial and volume nucleation the expressions for layer thickness and growth efficiency and criteria for LPE growth classification were obtained. The values of nucleation parameters may be calculated from growth efficiency experimental data for LPE growth.
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Malinin, A.J., Nevsky, O.B. New model OP LPE growth: Layer thickness calculation. J. Electron. Mater. 7, 757–774 (1978). https://doi.org/10.1007/BF02655473
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DOI: https://doi.org/10.1007/BF02655473