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CdZnTe photodiode arrays for medical imaging

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Abstract

In this paper, we report on the design, fabrication, and performance of the first CdZnTe Schottky photodiode arrays for radiation detection. High pressure Bridgman-grown CdZnTe substrates with bulk resistivities in the range 108 to 1010 ohm-cm were used. CdZnTe Schottky photodiodes were formed with In and Ti/Au contacts. Diode arrays with pixel sizes from 1000 × 1000 (im to 100 × 100 urn were fabricated. The diode’s I-V characteristics exhibited low leakage current and high bulk resistivity; leakage current decreased as diode pixel size was reduced. Response of these detector arrays to high energy photons was uniform and their energy resolution improved with smaller pixel size.

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Sudharsanan, R., Parodos, T., Ruzin, A. et al. CdZnTe photodiode arrays for medical imaging. J. Electron. Mater. 25, 1318–1322 (1996). https://doi.org/10.1007/BF02655026

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  • DOI: https://doi.org/10.1007/BF02655026

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