Abstract
The thermal reaction of rf-sputter-deposited tungsten films with a (100) silicon substrate is investigated by vacuum furnace annealing and rapid thermal annealing. An irradiation of the W/Si interface by a phosphorous ion beam at room temperature prior to annealing promotes a uniform interfacial growth of WSi2. The growth of WSi2 follows diffusion-controlled kinetics during both furnace annealing and rapid thermal processing. A growth law of x2 = kt is obtained for furnace annealing between 690 and 740° C, where x is the thickness of the compound, t is the annealing duration after an initial incubation period and k = 62 (cm2/s) exp (−-3.0 eV/kT). The surface smoothness of the suicide films improves with increasing ion dose.
Similar content being viewed by others
References
C. M. Osburn, M. Y. Tsai , S. Roberts , C. J. Lucchese and C. Y. Ting,VLSI Science and Technology/1982, edited by C. J. Dell'Oca ad W. M. Bullis, in Electrochem. Soc. Proc. 82–7, 213 (1982).
B-Y. Tsaur and C. H. Anderson, Jr., Appl. Phys. Lett.47,527 (1985).
L. D. Locker and C. D. Capio, J. Appl. Phys.44, 4366 (1973).
G. Bomchil, G. Goeltz and J. Torres, Thin Sold Films140,59 (1986).
M-A. Nicolet and S. S. Lau,VLSI Microstructure Science,edited by N. G. Einspruch, Vol. 6, Academic Press, New York,458 (1983).
R. Pantel, Y. Campidelli and F. Arnaud d'Avitaya, J. Electrochem. Soc.131, 2426 (1984).
G. Goltz, J. Torres, J. Lajzerowicz, Jr. and G. Bomchil, Thin Solid Films124, 19 (1985).
B-Y. Tsaur, C. K. Chen, C. H. Anderson, Jr. and D. L. Kwong,J. Appl. Phys.57, 1890 (1985).
D. L. Kwong, D. C. Meyers, N. S. Alvi, L. W. Li and E. Nor-beck, Appl. Phys. Lett.47, 688 (1985).
J. Lajzerowicz, Jr., J. Torres, G. Goltz and R. Pantel, Thin Solid Films140, 23 (1986).
M. Siegal , J. J. Santiago , J. Van der Spiegel , W. R. Graham and M. Setton , presented at Symposium A of MRS Fall meeting, Boston, MA. Dec. 1986, to be published inMaterials Research Society Symposia Proceedings.
M. Siegal , J. J. Santiago and J. Van der Spiegel, inRapid Thermal Processing edited by T. Sedgwick, T. Seidel and B.Y. Tsaur,Materials Research Society Symposia Proceedings 52, 289 (1986).
J. C. Gelpey, P. O. Stump and J. W. Smith, ibid, 199.
C.-D. Lien and M-A. Nicolet, J. Vac. Sci. Technol.B2, 738(1984).
P. Revesz, J. Gyimesi and E. Zsoldos, J. Appl. Phys.54, 1860(1983).
N. S. Alvi, unpublished results.
S. S. Lau, C. S. Pai, C. S. Wu, T. F. Kuech and B. X. Liu,Appl. Phys. Lett.41, 77 (1982).
L. S. Wielunski, C. D. Lien, B. X. Liu and M-A. Nicolet, J. Vac. Sci. Technol.20, 175 (1982).
B. Y. Tsaur and L. S. Hung, Appl. Phys. Lett.37, 922 (1986).
K. Maex, L. van den Hove and R. F. De Keersmaecker, Thin Solid Films140, 149 (1986).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Ma, E., Lim, B.S., Nicolet, MA. et al. Growth of WSi2 in phosphorous-implanted W/«Si» couples. J. Electron. Mater. 17, 207–211 (1988). https://doi.org/10.1007/BF02652179
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02652179