Abstract
A method using a H2/AsH3 plasma to clean the Si surface before GaAs heteroepitaxy was investigated and the dependence of the effectiveness of this treatment on arsine partial pressure was studied. Thin GaAs-on-Si films deposited on the plasma-cleaned Si were analyzed using plan-view TEM, HRXTEM and SIMS. Although not optimized, this method of Si cleaning makes heteroepitaxial deposition of GaAs possible. Some roughening of the Si surface was observed and a possible explanation is offered. Using the results of this study, thick (2.5–3.0μm) epitaxial GaAs films were then deposited and their quality was evaluated using RBS, XTEM and optical Nomarski observation. All Si surface cleaning and GaAs deposition were carried out at temperatures at or below 650°.
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H. K. Choi, G. W. Turner, B.-Y. Tsaur and T. H. Windhorn,Mat. Res. Soc. Proc.67, 165 (1986).
H. Kroemer, Mat. Res. Soc. Proc.67, 3 (1986).
D. W. Shaw, Mat. Res. Soc. Symp. Proc.91, 15 (1987).
R. Fischer, N. Chand, W. Kopp, H. MorkoÇ, L. P. Erickson and R. Youngman, Appl. Phys. Lett.47, 397 (1985).
M. Kawabe and T. Ueda, Jpn. J. Appl. Phys.26, L944 (1987).
N. El-Marsy, N. Hamaguchi, J. C. L. Tarn, N. Karam, J.W. Lee and J. Salerno, Mat. Res. Soc. Proc.91, 99 (1987).
T. Soga and S. Hattori, J. Appl. Phys.57, 4578 (1985).
J. W. Lee, H. Shichijo, H. L. Tsai and R. J. Matyi, Appl. Phys. Lett.50, 31 (1987).
H. Okamoto, Y. Kadota, Y. Watanabe, presented at the 20th IEEE Photovoltaic Specialist Conference, Las Vegas, Nevada, September 26–30, 1988.
M. Yamaguchi, A. Yamamoto, M. Tachikawa, Y. Itoh and M.Sugo, Appl. Phys. Lett.53, 2293 (1988).
Shin Hashimoto, L. J. Schowalter, G. A. Smith, E. Y. Lee, W. M. Gibson and P. A. Claxton, Mat. Res. Soc. Symp. Proc.116, 257 (1988).
M. Akiyama, Y. Kawarada and K. Kaminishi, Jpn. J. Appl. Phys.23, L843 (1984).
T. J. Donahue and R. Reif, J. Appl. Phys.57, 2757 (1985).
R. A. Rudder, G. G. Fountain and R. J. Markunas, J. Appl. Phys.60, 3519 (1986).
T. Shibata, Y. Nanishi and N. Kondo, Proc. 1988 Dry Process Symposium, Oct. 24–25, Tokyo, Japan, pp. 145–150.
T. Shibata, N. Kondo and Y. Nanishi, to be published in the Nov. issue of J. Electrochem Soc.
H. Heinecke, A. Brauers, H. Lueth and P. Balk, J. Cryst. Growth77, 241 (1986).
K. P. Pande and A. C. Seabaugh, J. Electrochem. Soc.131,1357 (1984).
K. P. Pande and O. Aina, J. Vac. Sci. Technol. A,4, 673(1986).
A. D. Huelsman, E. Yoon and R. Reif, Mat. Res. Soc. Symp. Proc.98, 235 (1987).
A. D. Huelsman, R. Reif and C. G. Fonstad, Appl. Phys. Lett.50, 206 (1987).
A. D. Huelsman, L. Zien and R. Reif, Appl. Phys. Lett.52, 726 (1988).
A. Ishizaka and Y. Shiraki, J. Electrochem. Soc.133, 666(1986).
J. E. Palmer, G. Burns, C. G. Fonstad and C. V. Thompson,Appl. Phys. Lett.55, 205 (1987).
S. M. Koch, S. J. Rosner, R. Hull, G. W. Yoffe and J. S. Harris, Jr., J. Cryst. Growth,81, 205 (1987).
K. Ishida, M. Akiyama and S. Nishi., Jpn. J. Appl. Phys.25,L288 (1986).
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Yoon, E., Parris, P. & Reif, R. Low temperature cleaning of Si by a H2/AsH3 plasma prior to heteroepitaxial growth of GaAs by metalorganic chemical vapor deposition (MOCVD). J. Electron. Mater. 19, 337–343 (1990). https://doi.org/10.1007/BF02651294
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DOI: https://doi.org/10.1007/BF02651294