Abstract
We consider a new method for monitoring the purity of process liquid by dispersing it and then analyzing the nonvolatile impurities. We give recommendations for technical implementation of this technique based on the charge induction method for measuring particle parameters, and we indicate ways to further improve it.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Y. Hayakawa (ed.), Clean Rooms [Russian translation from Japanese], Mir, Moscow (1990).
B. Yu. Kol'tsov and S. A. Yakovlev, in: Problems and Methods of Aerodynamics: Collection of Scientific Papers [in Russian; V. A. Korobkov (ed.)], SPGAAP, St. Petersburg (1994), p. 134.
A. B. Review, J. Aerosol Science,9, 1344 (1974).
Y. Tamori, Methods for Generation of Standard Aerosols [Russian translation from Japanese], Kogai (1984), Vol. 21, p. 225.
B. Yu. Kol'tsov and S. A. Yakovlev, Izmerit. Tekh., No. 11, 14 (1994).
V. V. Rumyantsev and S. A. Yakovlev, Izmerit. Tekh., No. 1, 56 (1996).
P. C. Reist, Introduction to Aerosol Science [Russian translation], Mir, Moscow (1987).
Additional information
Translated from Izmeritel'naya Tekhnika, No. 12, pp. 57–61, December, 1997.
Rights and permissions
About this article
Cite this article
Kol'tsov, B.Y., Chernov, A.A. & Yakovlev, S.A. Method for on-line monitoring of the purity of process water. Meas Tech 40, 1221–1227 (1997). https://doi.org/10.1007/BF02504171
Issue Date:
DOI: https://doi.org/10.1007/BF02504171