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System for monitoring the electrophysical parameters of apparatus for synthesis of coatings from arc plasma in vacuum

  • Electromagnetic Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

Devices and procedures for studies of the electrophysical properties of arc plasma and monitoring and measuring technological processes for optimization and automation are described.

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References

  1. R. V. Bychkovskii et al.,Instruments for Contact Measurement of Temperature [in Russian], Vishcha Shkola, Lvov (1978).

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  2. A. P. Dostanko et al.,Plasma Metallization in Vacuum [in Russian], Nauka i Tekhnika, Minsk (1983).

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Authors
  1. Yu. B. Matveev
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 2, pp. 42–44, February, 2000.

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Matveev, Y.B. System for monitoring the electrophysical parameters of apparatus for synthesis of coatings from arc plasma in vacuum. Meas Tech 43, 155–157 (2000). https://doi.org/10.1007/BF02503578

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  • DOI: https://doi.org/10.1007/BF02503578

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