The identification of faulted prismatic dislocation loops in single crystals of undoped InP

Abstract

High-voltage transmission electron microscopy has shown that undoped single crystals of indium phosphide, grown by the liquid-encapsulated Czochralski technique, can contain linear arrays of faulted dislocation loops. The plane of the loops is (1 1 0), the fault vector is 1/n [1 1 0] and the Burgers vector of the dislocation loop is 1/n [1 1 0]. A direct correlation has been obtained between these loops and arrays of both ridge and prism features revealed by chemical etching. Sequential use of two etchants has also established a direct link between the faulted dislocation loops and the slip dislocations induced by thermal stresses during crystal growth. A study of a number of crystals grown from differently prepared starting materials suggests that the formation of the loops is associated with departures from stoichiometry and inhibited by the presence of dopant impurities.