Etch features in Czochralski-grown single crystal indium phosphide

Abstract

Two etchants for InP have been used to categorize etch features in both horizontal and vertical sections of InP single crystals grown by the Czochralski liquid encapsulation technique; these are the AB etchant, used extensively for defect analysis in GaAs and another etchant based on a phosphoric acid/hydrobromic acid mixture. The behaviour of these etchants is different but a cross correlation has been made between the types of etch feature produced. Transmission X-ray topography has been used to correlate etch features with dislocations. Nominally undoped crystals and material doped with specific impurities, e.g. Fe, Ge, Zn, have been examined. The principal features produced by etching are pits, ridges and striations. It is shown that the density and distribution of pits and ridges is consistent with these features being dislocation structures and the mechanisms by which they are revealed are discussed in terms of etching rates. The results allow comment to be made upon interface shape and the source of dislocations in InP crystals grown by the Czochralski technique.