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Study of solid state reactions in Nb/Al multilayer thin films

Differential scanning calorimetry

  • Inorganic Compounds
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Abstract

Solid state reactions of sputter-deposited Nb/Al multilayer thin films, with periodicities in the range 10–333 nm, have been studied by differential scanning calorimetry. The first phase to form upon annealing the films in NbAl3. Constant-heating-rate calorimetric measurements show the presence of two peaks for the formation of this phase, while isothermal scans reveal that the first peak is associated with a nucleation and growth type transformation. The formation of NbAl3 is thus interpreted as a two-stage process of nucleation and growth to coalescence (first peak) followed by growth until the consumption of one or both reactants (second peak).

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We thank NSF for support through DMR-9308651, K. Coffey, S. Vivekanand and B. Gadicharla for assistance and TA Instruments for the donation of a 1600°C furnace.

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Barmak, K., Michaelsen, C. & Ma, F. Study of solid state reactions in Nb/Al multilayer thin films. Journal of Thermal Analysis 49, 1179–1185 (1997). https://doi.org/10.1007/BF01983673

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  • DOI: https://doi.org/10.1007/BF01983673

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