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Thickness determination from the GDOS depth profiles using piece-wise linear model functions

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Abstract

A data processing method is presented making it possible to determine thin film thickness from GDOS depth profiles. It consists of fitting a piece-wise linear function to the depth profile and in using positions (abscissae) of their knots as parameters which are proportional to film thickness. For thickness calibration, such a linear combination of these parameters is used, which gives minimum variation coefficient of the residuals between the real and the estimated thickness of calibration samples. Relative error lower than 3% was obtained in calibration using 4 samples with nickel film thickness ranging from 0.1 to 8.3 μm, each analyzed four times.

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Authors and Affiliations

  1. Institute of Chemical Processes Fundamentals, Czechoslovak Academy of Sciences, Rozvojová 135, 162 08, Prague 6-Suchdol, Czechoslovakia

    Jindřich Weiss

  2. Central Research Institute, SKODA Corp., 316 00, Plzeň, Czechoslovakia

    Zdeněk Weiss

Authors
  1. Jindřich Weiss
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  2. Zdeněk Weiss
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Weiss, J., Weiss, Z. Thickness determination from the GDOS depth profiles using piece-wise linear model functions. Mikrochim Acta 107, 81–89 (1992). https://doi.org/10.1007/BF01772357

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  • DOI: https://doi.org/10.1007/BF01772357

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