Abstract
The article deals with the structure of thin aluminium films evaporated on air-cleaved NaCl substrates. The effect of the substrate temperature and the film thickness on the structure, the orientation and the grain size of the films was studied at a deposition rate of 10 Å/see (ev. 50 Å/see) in a vacuum of about 7. 10−5 torr. The optimum temperature for epitaxial growth was found to be about 420°C. An almost regular arrangement of grains was found in the thickness region of 90–150 Å.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Delong A., Drahoš V.: Third Czechoslovak Conf. on Electronics and Vacuum Physics Trans. Academia, Prague 1967, 633.
Ino S., Watanabe D., Ogawa S.: J. Phys. Soc. Japan19 (1964), 881.
Murr L. E., Inman M. C.: Phil. Mag.14 (1966), 135.
Ogawa S., Ino S., Kato T., Ota H.: J. Phys. Soc. Japan21 (1966), 1963.
Kunz K. M., Green A. K., Bauer E.: Phys. stat. sol.18 (1966), 441.
Podbrdský J., Drahoš V.: Czech. J. Phys. (in press).
Sloope B. W., Tiller C. O.: J. Appl. Phys.32 (1961), 1331.
Mihama K., Miyhara H., Aoe H.: J. Phys. Soc. Japan23 (1967), 786.
Matthews J. W., Grunbaum E.: Phil. Mag.11 (1965), 1233.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Podbrdský, J., Drahoš, V. Electron microscope study of aluminium films evaporated on air-cleaved sodium chloride. Czech J Phys 19, 217–221 (1969). https://doi.org/10.1007/BF01689851
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01689851