Abstract
On applying voltage to a thin film Al-Al2O3-M system, one observes a decrease of the leakage current with time. After a long period (103–104 s) the current settles at a new value, lower by several orders of magnitude. After shortcircuiting the sample, there appears a discharge current of reversed polarity, with decay time again of the order of 103 s. This effect has been reproducibly observed in the temperature range 80–500 K. The present paper is devoted to the experimental study of this relaxation phenomenon in dependence on the parameters of the system (thickness of the dielectric layer, temperature, and material of the upper electrode).
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The paper is based on RNDr Thesis of the first author.
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Škoda, V., Hrach, R. Dielectric relaxation effect in MIM systems. Czech J Phys 28, 919–927 (1978). https://doi.org/10.1007/BF01600099
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DOI: https://doi.org/10.1007/BF01600099