Estimation of the electron backscattering factor in AES

Abstract

To obtain reliable results in quantitative Auger analysis one must take into account the factors dependent on the matrix of the analysed material. One of the most important among them is the so-called backscattering factor which expresses the enhancement of the Auger yield as a consequence of the backscattered primary electrons. Until now, several different approaches to its determination have been published, the obtained results, however, more or less differ one from an other. By comparing the results of various theoretical and empirical approaches with experimental data we try to choose the most appropriate method for calculation of the backscattering factor. This method should provide sufficiently accurate values. At the same time we try to avoid using such methods which are laborious, numericaly complicated or require various experimental procedures.