Plasmadiagnostik mit Emittierenden Sonden Durch Ausnutzung der Örtlichen Störung des Ionisationsgleichgewichts

Abstract

The emissive probe is used generally to determine exclusively the plasma potential. The emissive probes have distinct advantages over collecting probes, because several conditions which restrict the spectrum of application fall away. In this paper the methods for the determination of plasma potentials are discussed and completed by new techniques using the local perturbation of the ionization balance. On the other hand it is shown that further plasma data can be obtained exploiting the plasma response on the emitted electrons accelerated by the probe bias voltage. In this way the total ionization rate, the portion of direct ionization, the concentration of metastable atoms and the life time of metastables are determined for selected conditions.