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Energy dispersive analysis of X-ray radiation from the inhomogeneous surface layer

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Czechoslovak Journal of Physics B Aims and scope

Abstract

The intensities of theK α -line of phosphorus as a function of the energy of primary electron beam and of the change in take-off angle were measured on the iron sample with implanted phosphorus by means of the EDS analysis in the scanning electron microscope. The observed dependences are confronted with model conception of the concentration distribution of the implanted element in the iron. The possibility of analysing the element composition in the region smaller than the excited volume is shown.

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Authors and Affiliations

  1. Institute of Experimental Physics, Slovak Acad. Sci., Solovjevova 47, 040 01, Košice, Czechoslovakia

    J. Miškuf & K. Csach

  2. Faculty of Metallurgy, Technical University, Švermova 9, 040 01, Košice, Czechoslovakia

    V. Karel

Authors
  1. J. Miškuf
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  2. K. Csach
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  3. V. Karel
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Dedicated to Academician Vladimír Hajko on the occasion of his 65th birthday.

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Miškuf, J., Csach, K. & Karel, V. Energy dispersive analysis of X-ray radiation from the inhomogeneous surface layer. Czech J Phys 35, 1209–1212 (1985). https://doi.org/10.1007/BF01597006

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  • DOI: https://doi.org/10.1007/BF01597006

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