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To the kinetics and mechanism of magnesium nitridation in a dc discharge

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Czechoslovak Journal of Physics B Aims and scope

Abstract

The experimental study of magnesium nitridation simultaneously on the cathode, on the anode and in the positive column of dc nitrogen glow discharge at pressures 0·3 –5 Torr and currents 2–40 mA is presented. Main factors which affect the course of kinetic dependences are discussed. A scheme of possible reaction paths during both thermal and plasma film growth is suggested.

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Authors and Affiliations

  1. Institute of Physics, Czechosl. Acad. Sci., Prague, Na Slovance 2, 180 40, Praha 8, Czechoslovakia

    L. Láska & J. Kodymová

Authors
  1. L. Láska
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  2. J. Kodymová
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The authors are indebted to Dr. V.Hermoch and Dr. K.Mašek for valuable remarks concerning the manuscript.

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Láska, L., Kodymová, J. To the kinetics and mechanism of magnesium nitridation in a dc discharge. Czech J Phys 27, 1219–1231 (1977). https://doi.org/10.1007/BF01589018

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  • DOI: https://doi.org/10.1007/BF01589018

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