Optodynamic analysis of direct laser writing of graduation lines

Abstract

The direct laser writing of graduation lines in Cr thin films on glass substrates has been investigated. The Nd-YAG laser and the astigmatic optical system have been used to write rectangular holes in the Cr film. The optimal writing parameters: the laser pulse energy, the Cr layer thickness and the substrate-objective distance were determined using the optoacoustic probe beam deflection method to detect the evaporation of the material. The evaporation is concluded to be the essential process in the laser writing of graduation lines. The rims formed by the surface tension gradient at the hole edges indicate that the laser writing of graduation lines is a typical two-phase removal process.