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Oscillations in laser direct writing of W from WCl6 and H2: A theoretical analysis

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Abstract

The origin of oscillations observed in laser direct writing of W lines on quartz substrates is studied on the basis of a one-dimensional model. The dependence of oscillations on laser power, scanning velocity, etc., is discussed. The predictions are compared with experimental data. The present approach can be applied also to other systems, where such oscillations have a different origin.

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References

  1. D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mat. Sci. Vol. 1 (Springer, Berlin, Heidelberg, 1986)

    Google Scholar 

  2. D.J. Ehrlich, J.Y. Tsao (eds.):Laser Microfabrication-Thin Film Processes and Lithography (Academic, New York 1989)

    Google Scholar 

  3. S. Preuß, H. Stafast: Appl. Phys. A54, 152 (1992)

    Google Scholar 

  4. J. Messelhäuser, E.B. Flint, H. Suhr: Appl. Phys. A55, 196 (1992)

    Google Scholar 

  5. M.E. Gross, G.J. Fisanick, P.K. Gallagher, K.J. Schnoes, M.D. Fennell: Appl. Phys. Lett.47, 923 (1985)

    Google Scholar 

  6. L. Baufay, M.E. Gross: InLaser and Particle-Beam Chemical Processing for Microelectronics, ed by D.J. Ehrlich, G.S. Higashi, M.M. Oprysko, MRS Symp. Proc.101, 89 (MRS, Pittsburgh, MA 1988)

    Google Scholar 

  7. P.B. Kargl, R. Kullmer, D. Bäuerle: Appl. Phys. A57, 175 (1993)

    Google Scholar 

  8. F. Foulon, M. Stuke: Appl. Phys. A56, 283 (1993)

    Google Scholar 

  9. P.E. Price Jr, K.F. Jensen: Chem. Eng. Sci.44, 1879 (1989)

    Google Scholar 

  10. N. Arnold, P.B. Kargl, D. Bäuerle: Appl. Surf. Sci.86, 457 (1995)

    Google Scholar 

  11. J. Han, K.F. Jensen: J. Appl. Phys.75, 2240 (1994)

    Google Scholar 

  12. N.V. Karlov, N.A. Kirichenko, B.S. Luk'yanchuk:Laser Thermochemistry (Nauka, Moscow 1992)

    Google Scholar 

  13. N. Arnold, R. Kullmer, D. Bäuerle: Microelectron. Eng.20, 31 (1993)

    Google Scholar 

  14. R. Kullmer, P.B. Kargl, D. Bäuerle: Thin Solid Films218, 122 (1992)

    Google Scholar 

  15. G. Dittmer, U. Niemann: Philips Res. J.36, 89 (1981)

    Google Scholar 

  16. N. Arnold, D. Bäuerle: Microelectron. Eng.20, 43 (1993)

    Google Scholar 

  17. E.G. Mehalchick, M.B. MacInnis: Electrochem. Technol.6, 66 (1968)

    Google Scholar 

  18. Gmelin Handbuch der Anorganischen Chemie: W. Wolfram. Tungsten, Suppl. B1, Suppl. B2 (Springer, Berlin, Heidelberg 1979) p. 161

  19. A.A. Andronov, A.A. Vitt, S.E. Khaikin:Theory of Oscillations (Nauka, Moscow 1981)

    Google Scholar 

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Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität Linz, A-4040, Linz, Austria

    N. Arnold, P. B. Kargl, R. Kullmer & D. Bäuerle

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  1. N. Arnold
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  2. P. B. Kargl
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  3. R. Kullmer
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  4. D. Bäuerle
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Arnold, N., Kargl, P.B., Kullmer, R. et al. Oscillations in laser direct writing of W from WCl6 and H2: A theoretical analysis. Appl. Phys. A 61, 347–351 (1995). https://doi.org/10.1007/BF01540106

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  • DOI: https://doi.org/10.1007/BF01540106

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