Skip to main content
SpringerLink
Log in

Nanosecond and femtosecond excimer-laser ablation of oxide ceramics

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The uv laser-ablation behavior of various oxide ceramics (Al2O3, MgO, ZrO2) has been studied using different wavelengths (248 nm, 308 nm) and pulse durations (30 ns, 500 fs). Time-resolved absorption measurements of the sample and the ablation plume during ablation were performed.

Using sub-ps pulses the ablation threshold fluence is generally lower than for ns pulses; the ablation rate is higher in the whole investigated fluence range up to 20 J/cm2.

The study of the morphology of the ablation structures and the results of the absorption experiments lead to the conclusion that different ablation mechanisms are involved. Using ns pulses “plasma mediated ablation” is dominating, whereas in the fs case the process is controlled by multi-photon absorption enabling microstructuring of the material.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R. Srinivasan, B. Braren: Chem. Rev.89, 1303 (1989)

    Google Scholar 

  2. E. Hontzopoulos, E. Damigos: Appl. Phys. A52, 421 (1991)

    Google Scholar 

  3. F. Kokai, K. Amano, H. Ota, F. Umemura: Appl. Phys. A54, 340 (1992)

    Google Scholar 

  4. I. Miyamoto, H. Maruo: Proc. ECO-3 (1990)

  5. U. Sowada, P. Lokai, H.-J. Kahlert, D. Basting: Laser und Optoelektronik21, 107 (1989)

    Google Scholar 

  6. H.K. Tönshoff, O. Gedrat: Proc. ECO-3 (1990)

  7. M. Geiger, N. Lutz, S. Biermann: Proc. SPIE1503, 238 (1991)

    Google Scholar 

  8. H.K. Tönshoff, D. Hesse, O. Gedrat: Proc. SPIE1810, 572 (1992)

    Google Scholar 

  9. D. Bäuerle: Appl. Phys. A48, 527 (1989)

    Google Scholar 

  10. R.W. Dreyfus, R. Kelly, R.E. Walkup: Appl. Phys. Lett.49, 1478 (1986)

    Google Scholar 

  11. J. Ihlemann, B. Wolff, P. Simon: Appl. Phys. A54, 363 (1992)

    Google Scholar 

  12. S. Szatmári, F.P. Schäfer: Opt. Commun.68, 196 (1988)

    Google Scholar 

  13. H.K. Tönshoff, O. Gedrat: Proc. SPIE1377, 38 (1990)

    Google Scholar 

  14. J. Ihlemann, H. Schmidt, B. Wolff-Rottke: Adv. Mater. Opt. Electron.2, 87 (1993)

    Google Scholar 

  15. S. Lazare, V. Granier: Laser Chem.10, 25 (1989)

    Google Scholar 

  16. Y.P. Kim, M.H.R. Hutchinson: Appl. Phys. B49, 469 (1989)

    Google Scholar 

  17. P. Liu, W.L. Smith, H. Lotem, J.H. Bechtel, N. Bloembergen, R.S. Adhav: Phys. Rev. B17, 4620 (1978)

    Google Scholar 

  18. P. Simon, H. Gerhardt, S. Szatmári: Opt. Lett.14, 1207 (1989)

    Google Scholar 

  19. Handbook of Laser Science and Technology, ed. by M.J. Weber (CRC, Baton Rouge, FL 1986) Vol. IV, P. 2, p. 9

    Google Scholar 

  20. M. Rothschild, D.J. Ehrlich, D.C. Shaver: Appl. Phys. Lett.55, 1276 (1989)

    Google Scholar 

  21. E. Matthias, Z.L. Wu: Appl. Phys. A56, 95 (1993)

    Google Scholar 

  22. O. Kreitschitz, W. Husinsky, G. Betz, N.H. Tolk: Nucl. Instrum. Methods Phys. Res. B78, 327 (1993)

    Google Scholar 

  23. S. Küper, M. Stuke: Appl. Phys. B44, 199 (1987)

    Google Scholar 

  24. S. Küper, M. Stuke: Appl. Phys. Lett.54, 4 (1989)

    Google Scholar 

  25. D.L. Andrews: Am. J. Phys.53, 1001 (1985)

    Google Scholar 

  26. R.F. Haglund, Jr., M. Affatigato, J.H. Arps, K. Tang, A. Niehof, W. Heiland: Nucl. Instrum. Methods Phys. Res. B65, 206 (1992)

    Google Scholar 

  27. Handbook of Thermophysical Properties of Solid Materials, Vol. 3 — Ceramics (Pergamon, Oxford 1961) p. 33

  28. M.v. Allmen:Laser-Beam Interactions with Materials, Springer Ser. Mater. Sci., Vol. 2 (Springer Berlin, Heidelberg 1987), pp. 34–39

    Google Scholar 

  29. M.L. Scott: InLaser-Induced Damage in Optical Materials, NBS Spec. Pub.688, 329 (1983)

  30. P. Schwab, J. Heitz, S. Proyer, D. Bäuerle: Appl. Phys. A53, 282 (1991)

    Google Scholar 

  31. A.C. Tam, J.L. Brand, D.C. Cheng, W. Zapka: Appl. Phys. Lett.55, 2045 (1989)

    Google Scholar 

  32. W. Zapka, A.C. Tam, J.L. Brand, D.C. Cheng, P. Simon: Bull. Am. Phys. Soc.34, 1687 (1989)

    Google Scholar 

  33. L. Dirnberger, P.E. Dyer, S. Farrar, P.H. Key, P. Monk: Appl. Surf. Sci.69, 216 (1993)

    Google Scholar 

  34. R.L. Webb, L.C. Jensen, S.C. Langford, J.T. Dickinson: J. Appl. Phys.74, 2323 (1993)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077, Göttingen, Germany

    J. Ihlemann, A. Scholl, H. Schmidt & B. Wolff-Rottke

Authors
  1. J. Ihlemann
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Scholl
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. Schmidt
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. B. Wolff-Rottke
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ihlemann, J., Scholl, A., Schmidt, H. et al. Nanosecond and femtosecond excimer-laser ablation of oxide ceramics. Appl. Phys. A 60, 411–417 (1995). https://doi.org/10.1007/BF01538343

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01538343

PACS

Search

Navigation