Abstract
Known chlorine atom concentrations were prepared in a discharge flow system and used to etch the (100) face of a gallium arsenide single crystal. The etch rate was monitored by mass spectrometry, laser interferometry, and surface proftlometry. In the temperature range from 90 to 160°C the reaction can be described by the rate law
where
Similar content being viewed by others
References
C. B. Cooper, S. Salimian, and M. E. Day,Solid Stare Technol., p. 109, January (1989).
G. Smolinsky, R. P. Chang, and T. M. Mayer,J. Vac. Sci. Technol. 18, 12 (1982).
V. M. Donnelley, D. L. Flamm, C. W. Tu, and D. E. Ibbotson,J. Electrochem. Soc. 129, 2533 (1982).
E. A. Ogryzlo, D. L. Flamm, D. E. Ibbotson, and J. A. Mucha,J. Appl. Phys. 64, 6510 (1986).
J. J. Ha, S. Polyhronopoulos, and E. A. Ogryzlo,J. Chem. Phys. 89, 2844 (1988).
E. A. Ogryzlo,J. Phys. Chem. 65, 191 (1961).
E. A. Ogryzlo,Can. J. Chem. 39, 2556 (1961).
L. W. Bader and E. A. Ogryzlo,J. Chem. Phys. 41, 2926 (1964).
R. J. Brown and E. A. Ogryzlo,J. Chem. Phys. 52, 5774 (1970).
Mathew Vernon, to be published.
Lisa Delouise, to be published.
Frances Houle, to be published.
S. Sugata and K. Asakawa,J. Vac. Sci. Technol. B5, 894 (1987).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Hat, J.H., Ogryzlo, E.A. Rate constants for the etching of gallium arsenide by atomic chlorine. Plasma Chem Plasma Process 11, 311–321 (1991). https://doi.org/10.1007/BF01447249
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF01447249