Abstract
The physical and chemical processes taking place in multicomponent gas-plasma mixtures are considered. A theoretical model of selective condensation during relaxation of the mixture is developed. It is shown that the condensation process depends strongly on the concentration of charged particles, which appear to be condensation nuclei. The concentration of the charged nuclei isfound to be influenced by the initial conditions of gas-plasma mixture relaxation. Illustrative calculations for titanium ultrafine powder deposition during plasma-chemical processing of titanium tetrachloride are carried out.
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Smirnov, B.M., Tishchenko, N.P. Selective condensation during relaxation of multicomponent gas-plasma mixtures. Plasma Chem Plasma Process 11, 561–577 (1991). https://doi.org/10.1007/BF01447166
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DOI: https://doi.org/10.1007/BF01447166