Abstract
The degree of dissociation of molecular hydrogen in a RF parallel plate plasma reactor is analyzed by three dif erent emission spectroscopic methods. These schemes are based on the comparison of line intensities of atomic and molecular hydrogen and of argon which is admixed as a tracer gas (actinometry). The different schemes yield similar results in the parameter ranges where they are applicable. The basic assumptions, the available cross sections, and the conditions and limitations of applicability of the different schemes are compared and discussed.
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D. P. Dowling, T. B. O. Brien, E. M. Davitt, K. Donelly, T. C. Kelly, H. F. Döbele, V. Kornas, W. G. Graham, R. Cheshire and T. Morgan,Diamond Relat. Mater. 3, 703 (1994).
P. Bogen, Ph. Mertens, E. Pasch and H. F. Döbele,J. Opt. Sot. Am. B 9, 2137 (1992).
G. C. Stutzin, A. T. Young, H. F. Döbele, A. S. Schlachter, K. N. Leung, and W. B. Kunkel,Rev. Sci. Instrum. 61, 619 (1990).
D. Wagner, B. Dikmen, and H. F. Döbele,Publ. Eur. Phys. Soc. 18E, 452 (1994).
B. L. Preppernau, D. A. Dolson, R. A. Gottscho, and T. A. Miller,Plasma Chern. Plasina Process. 9, 157 (1989).
U. Czarnetzki, K. Miyazaki, T. Kajiwara, M. Muraoka, M. Maeda, and H. F. Döbele,J. Opt. Soc. Am. B 11, 2155 (1994).
A. M. Devjatov, A. V. Kalinin, and S. R. Miiovich,Opt. Spectrosc. 71, 525 (1991).
J. W. Coburn and M. Chen,J. Appl. Phys. 51, 3134 (1980).
L. St.-Onge and M. Moisan,Plasina Chem. Plasma Process. 14, 87 (1994).
S. E. Savas,Appl. Phys. Lett. 48, 1042 (1980).
I. P. Bogdanova and S. V. Yurgenson,Opt. Spectrosc. 62, 281 (1987).
A. Chutjian and D. C. Cartwright,Phys. Rev. A. 23, 2178 (1981).
G. H. Dicke, “The hydrogen molecular wavelength tables of Gerhard Heinrich Dicke,” H. M. Crosswhite, ed., Wiley-Interscience, New York (1972).
G. Herzberg,The Spectra of Diatomic Molecules, Litton Educational Publishing (1950).
M. A. Marechal, R. Jost, and M. Lombardi,Phys. Rev. A. 5, 732 (1972).
G. R. Möhlmann and F. J. DeHeer,Chem. Phrs. Lett. 43, 240 (1976).
J. D. Walker, Jr. and R. M. St. John,J. Chem. Phys. 61, 2394 (1974).
G. R. Möhlmann, F. J. DeHeer, and J. Los,Chem. Phys. 25, 103 (1977).
B.P. Lavrov,Opt. Spectrosc. 42, 250 (1977).
R. J. Spindler,J. Quant. Spectrosc. Radiat. Transfer 9, 597 (1969).
L. Vriens and A. H. M. Smeets,Phys. Rev. A,22, 940 (1980).
V. E. Bubelev and A. N. Grum-Grzhimailo,J. Phys. B 24, 2183 (1991).
S. Djurovic and J. R. Roberts,J. Appl. Phys. 74, 6558 (1993).
I. P. Zapesochnyi and P. V. Feltsan,Opt. Spectrosc. 20, 291 (1966).
J. K. Ballou, C. C. Lin, and F. E. Fajen,Phys. Rev. A 8, 1797 (1973).
M. L. Burshtein, B. P. Lavrov, A. S. Melnikov, V. P. Prosikhin, S. V. Yurgenson, and V. N. Yakovlev,Opt. Spectrosc. 68, 166 (1990).
M. L. Burshtein, B. P. Lavrov, and V. N. Yakovlev,Opt. Spectrosc. 62, 729 (1987).
A. E. Belikov, O. V. Kusnetsov, and R. G. Sharafutdinov,J. Chem. Phys. 102, 2792 (1995).
M. B. Hopkins and W. G. Graham,J. Phys. D 20, 838 (1987).
A. Anders,A Formularv for Plasma Physics, Akademie-Verlag, Berlin (1990).
R. W. P. McWhirter in Plasma Diagnostic Techniques, R. H. Huddlestone and S. L. Leonard, eds., Academic Press, New York (1965).
R. K. Janev, W. D. Langer, K. Evans, Jr., and D. E. Post, Jr.,Elementary Processes in Hydrogen-Helium Plasmas, Springer-Verlag, Berlin (1987).
L. G. Piper, I. E. Velazco, and D. W. Setser,J. Chem. Phys. 59, 3323 (1973).
C. W. Allen,Astrophysical Quantities, The Athlone Press, London (1955).
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Schulz-von der Gathen, V., Döbele, H.F. Critical comparison of emission spectroscopic determination of dissociation in hydrogen RF discharges. Plasma Chem Plasma Process 16, 461–486 (1996). https://doi.org/10.1007/BF01447004
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DOI: https://doi.org/10.1007/BF01447004