Der Einfluß der Oberflächenrauhigkeit auf die Bestimmung der Dicke dünner Schichten

Abstract

The independent determination of the thicknesses of thin vacuum-deposited metal-films by the method ofTolansky and a X-ray-fluorescence-analytical method showed, that the Tolansky-method generally yields thicknesses, systematically too large by about 60–100 Å. The reason for this discrepancy may be, that the silverfilm, deposited on the testlayer, only incompletely adjusts itself to the roughness of the testlayer-surface.