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Determination of the Mass Absorption Coefficient in Two-Layer Ti/V and V/Ti Thin Film Systems by the X-Ray Fluorescence Method

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Journal of Applied Spectroscopy Aims and scope

A new XRF procedure for the determination of the mass absorption coefficient in thin film Ti/V and V/Ti two-layer systems has been proposed. The procedure uses easy-to-make thin-film layers of sputtered titanium and vanadium on a polymer film substrate. Correction coefficients have been calculated that take into account attenuation of primary radiation of the X-ray tube, as well as attenuation of the spectral line of the bottom layer element in the top layer.

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Correspondence to N. I. Mashin.

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 83, No. 1, pp. 65–69, January–February, 2016.

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Mashin, N.I., Chernyaeva, E.A., Tumanova, A.N. et al. Determination of the Mass Absorption Coefficient in Two-Layer Ti/V and V/Ti Thin Film Systems by the X-Ray Fluorescence Method. J Appl Spectrosc 83, 56–60 (2016). https://doi.org/10.1007/s10812-016-0242-0

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  • DOI: https://doi.org/10.1007/s10812-016-0242-0

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