Abstract
The composition of thin films of superconducting Sr-Bi-Ca-Cu-Pb ceramic, deposited by magnetron sputtering from targets prepared from oxide powders of the corresponding elements, was investigated. It was found that the film composition differs from that of the target. Microprobe analysis of target and films can be used to determine the correct target composition for the deposition of a superconducting film.
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References
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Additional information
Materials Science Institute, Ukrainian Academy of Sciences, Kiev. Translated from Poroshkovaya Metallurgiya, Nos. 5–6, pp. 27–30, May–June, 1996. Original article submitted May 25, 1994.
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Vereshchaka, V.M., Onoprienko, A.A. & Shaginyan, L.P. Analysis of the composition of Sr -Bi-Ca-Cu-Pb-O films obtained by magnetron sputtering. Powder Metall Met Ceram 35, 241–243 (1996). https://doi.org/10.1007/BF01328826
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DOI: https://doi.org/10.1007/BF01328826