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EDX depths analysis of MIS-structures

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Abstract

Based on experimental energy transfer distributionsdE/dx including the X-ray depth distribution function Φ (x,E 0,Z) an “effective-layer” method has been developed in order to “homogenize” a multilayer target. Effective layer thicknesses are related to real layer thicknesses by means of equal transmission-energy rates. This method has been proved by EDX measurements of Au-SiO2-Si structures showing good agreement with the real structures.

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Authors and Affiliations

  1. Fachbereich Physik der Universität Rostock, Universitätsplatz 3, D-18051, Rostock, Federal Republic of Germany

    Hans -Joachim Fitting, Jan -Christian Kuhr, Michael Goldberg, Bärbel Becher & Torsten Barfels

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  1. Hans -Joachim Fitting
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  2. Jan -Christian Kuhr
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  3. Michael Goldberg
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  4. Bärbel Becher
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  5. Torsten Barfels
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Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday

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Fitting, H.J., Kuhr, J.C., Goldberg, M. et al. EDX depths analysis of MIS-structures. Mikrochim Acta 125, 235–238 (1997). https://doi.org/10.1007/BF01246189

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