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An interlaboratory comparison of energy dispersive X-ray microanalysis (EDX) of titanium and zirkonium nitrides

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Abstract

The results of an interlaboratory comparison of energy dispersive X-ray microanalysis of TiN0.84 and ZrN were presented. The microprobe group of the German Physical Society (DPG) and the Federal Institute for Materials Research and Testing (BAM) had initiated the interlaboratory comparison. The primary aim was to test modern EDX systems equipped with ultrathin windows concerning the accuracy and reliability of the analysis of compounds containing light elements. The participants from 23 laboratories performed the analysis at different primary energies, in the standard-less mode as well as on the base of own standards, and considering Ti-K or Ti-L in case of TiN0.84. The results show a slight overestimation of the nitrogen content and a large standard deviation from the mean value. Reasons for the scattering of the results are discussed.

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Authors and Affiliations

  1. Bundesanstalt für Materialforschung und -prüfung, Unter den Eichen 87, D-12205, Berlin, Federal Republic of Germany

    M. Procop

  2. Martin-Luther-Universität Halle-Wittenberg, Experimentelle Physik III, Friedemann-Bach-Platz 6, D-06108, Halle (Saale), Federal Republic of Germany

    A. Röder

Authors
  1. M. Procop
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  2. A. Röder
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Dedicated to Professor Dr. rer. nat. Dr. h.c. Hubertus Nickel on the occasion of his 65th birthday

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Procop, M., Röder, A. An interlaboratory comparison of energy dispersive X-ray microanalysis (EDX) of titanium and zirkonium nitrides. Mikrochim Acta 125, 33–39 (1997). https://doi.org/10.1007/BF01246159

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  • DOI: https://doi.org/10.1007/BF01246159

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