Summary
Improvement in Quantitative Correction in SIMS Using Saha-Eggert Equation
A quantitative conversion of the secondary-ion current intensities into the elemental concentrations using the Saha-Eggert ionization equation was tried with a 78Ni-18Cr-1Ti-1Fe-1Cu-1Zr (each in at %) alloy. Improvements were made on the best-fit search of fitting parameters (T andN e). It proved to be important for the success in the conversion (1) to use the secondary-ion intensities from the sample in oxygen gas of >1.5×10−3 Pa, (2) to add the molecularion intensities to those of mother atomic ions even when the former are small and (3) to search for the fitting parameters considering the relative errors of concentrations not only for the internal standards but for as many elements as possible. With these procedures the largest error of elemental concentration could be reduced to 22% (Ar+ bombardment), 31% (O2 + bombardment) and 19% (N2 +bombardment).
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Secondary Ion Mass Spectrometry, NBS Special Publication 427, Washington: U. S. Government Printing Office 1975. pp. 79–120 and pp. 129–134.
J. A. McHugh, in: Methods of Surface Analysis (A. W. Czanderna, ed.). New York: Elsevier 1975. Chap. 6.
H. W. Werner, in: Electron and Ion Spectroscopy of Solids (L. Fiermans, J. Vennik, and W. Dekeyser, ed.). New York: Plenum 1978. pp. 324–441.
C. A. Andersen and J. R. Hinthorne, Anal. Chem.45, 1421 (1973).
F. G. Rüdenauer and W. Steiger, Vacuum26, 537 (1976).
J. N. Coles, Surf. Sci.55, 721 (1976).
A. E. Morgan and H. W. Werner, Anal. Chem.48, 699 (1976).
D. S. Simons, J. E. Baker, and C. A. Evans, Jr., Anal. Chem.48, 1341 (1976).
S. Tamaki, unpublished data.
C. A. Andersen and J. R. Hinthorne, Science175, 853 (1972).
H. W. Drawin, in: Reaction under Plasma Conditions. (M. Venugopalan, ed.) New York: Wiley 1971. Vol. 1. p. 53.
L. De Galan, R. Smith, and J. D. Winefordner, Spectrochim. Acta23 B, 521 (1968).
R. Shimizu, T. Ishitani, and Y. Ueshima, Japan. J. Appl. Phys.13, 249 (1974).
A. Benninghoven, Surf. Sci.28, 541 (1971).
M. Bernheim and G. Slodzian, Int. J. Mass Spectrom. Ion Phys.12, 93 (1973).
R. Shimizu, T. Ishitani, T. Kondo, and H. Tamura, Anal. Chem.47, 1020 (1975).
F. G. Rüdenauer, W. Steiger, and H. W. Werner, Surf. Sci.54, 553 (1976).
O. Kubaschewski and C. B. Alcock, Metallurgical Thermochemistry. New York: Pergamon 1979.
H. W. Werner, Surf. Interface Anal.2, 56 (1980).
S. Tamaki and H. Matsuda, Secondary Ion Mass Spectrometry SIMS IV (A. Benninghoven, J. Okano, R. Shimizu, and H. W. Werner, eds.). Berlin: Springer 1984. p. 85.
K. Wittmaack, Nucl. Instr. Meth.168, 343 (1980).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Tamaki, S. Improvement in quantitative correction in SIMS using Saha-Eggert equation. Mikrochim Acta 87, 1–13 (1985). https://doi.org/10.1007/BF01201981
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF01201981