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SNMS-analysis of insulators

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Abstract

Three different operation modes of secondary neutral mass spectrometry have been applied for bulk and depth profile analysis of various insulators and insulating surface layers. Sample charging by ion bombardment has been compensated by different experimental techniques.

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Authors and Affiliations

  1. Fachbereich Physik, Universität Kaiserslautern, Erwin-Schrödinger-Strasse, P.O. Box 3049, D-6750, Kaiserslautern, Federal Republic of Germany

    Jan Fritz Geiger, Michael Kopnarski, Hans Oechsner & Hubert Paulus

Authors
  1. Jan Fritz Geiger
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  2. Michael Kopnarski
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  3. Hans Oechsner
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  4. Hubert Paulus
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Geiger, J.F., Kopnarski, M., Oechsner, H. et al. SNMS-analysis of insulators. Mikrochim Acta 91, 497–506 (1987). https://doi.org/10.1007/BF01199524

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  • DOI: https://doi.org/10.1007/BF01199524

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