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A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam

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Abstract

New data concerning the influence of a probing beam of bismuth ions on the depth resolution in elemental depth profiling by secondary ion mass spectrometry (SIMS) have been obtained on a TOF.SIMS-5 system using the principle of two separate ion beams. It is established that the existing criterion of nondestructive character of the probing beam, on which this principle is based, is insufficient. Additional processes must be taken into account so as to formulate a more adequate criterion. A regime of depth profiling is proposed that allows the depth resolution to be improved at low energies of sputtering ions.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    M. N. Drozdov, Yu. N. Drozdov, A. V. Novikov, P. A. Yunin & D. V. Yurasov

  2. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603950, Russia

    A. V. Novikov & P. A. Yunin

Authors
  1. M. N. Drozdov
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  2. Yu. N. Drozdov
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  3. A. V. Novikov
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  4. P. A. Yunin
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  5. D. V. Yurasov
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Correspondence to M. N. Drozdov.

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Original Russian Text © M.N. Drozdov, Yu.N. Drozdov, A.V. Novikov, P.A. Yunin, D.V. Yurasov, 2018, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2018, Vol. 44, No. 8, pp. 11–19.

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Drozdov, M.N., Drozdov, Y.N., Novikov, A.V. et al. A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam. Tech. Phys. Lett. 44, 320–323 (2018). https://doi.org/10.1134/S1063785018040181

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  • DOI: https://doi.org/10.1134/S1063785018040181

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