Abstract
The techniques and figures of merit for multielement ultra trace analysis of refractory metals with high performance SIMS using oxygen primary ions is described. It is shown that SIMS provides detection limits which are in the range between 1 pg/g and 100 ng/g. Investigations concerning the accuracy of SIMS results are presented and impurity levels of sintered and electron beam refined tungsten and molybdenum given.
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Virag, A., Friedbacher, G. Ultra trace analysis of refractory metals by solid state mass spectrometry — A comparison of GDMS, SSMS and SIMS. Mikrochim Acta 91, 313–319 (1987). https://doi.org/10.1007/BF01199508
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DOI: https://doi.org/10.1007/BF01199508