Abstract
Electron energy loss spectroscopy (EELS) is used in analytical electron microscopy (AEM) because it can provide results on the chemical composition and structure of a small volume of material. The practical application of EELS was demonstrated by the investigation of a refractory hard metal of the type WC-TiC-Co and by the investigation of a BaTiO3 ceramic material. To demonstrate the present status of quantitative analysis by EELS, the spectra of Be2SiO4, TiB2 and BaTiO3 were quantified and the results indicate that quantitative analysis is feasible for major concentrations of light elements and also of heavier elements even in the presence of severe edge overlap.
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Hofer, F., Warbichler, P. Application of EELS to the microanalysis of materials. Mikrochim Acta 91, 125–134 (1987). https://doi.org/10.1007/BF01199484
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DOI: https://doi.org/10.1007/BF01199484