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Secondary-Ion Mass-Spectrometry on insulators with neutral primary particles

Sekundärionenmassenspektrometrie an Nichtleitern unter Verwendung neutraler Primärteilchen

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Summary

Normally, the analysis of insulators by the SIMS method is disturbed by charge effects. The use ofneutral primary particles (SIMS/NPB) appreciably reduces these effects and makes possible the analysis of both positive and negative secondary ions without artificially changing the actual distribution of highly mobile species in the solid to be analysed.

Zusammenfassung

Die Analyse von Nichtleitern mittels SIMS wird in der Regel durch Aufladungseffekte gestört. Die Verwendungneutraler Primärteilchen (SIMS/ NPB) verringert diese Effekte deutlich und ermöglicht sowohl die Analyse positiver wie negativer Sekundärionen, ohne die tatsächliche Verteilung sehr beweglicher Spezies im analysierten Festkörper künstlich zu verändern.

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Authors and Affiliations

  1. Laboratoire de Physique du Solide (L. A. 155), E. N. S. M. I. M., Nancy, France

    G. Borchardt, S. Scherrer & S. Weber

Authors
  1. G. Borchardt
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  2. S. Scherrer
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  3. S. Weber
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Additional information

On leave from: Institut für Theoretische Metallurgie, TU Clausthal, D-3392 Clausthal-Z. (Federal Republic of Germany).

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Borchardt, G., Scherrer, S. & Weber, S. Secondary-Ion Mass-Spectrometry on insulators with neutral primary particles. Mikrochim Acta 76, 421–432 (1981). https://doi.org/10.1007/BF01196961

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  • DOI: https://doi.org/10.1007/BF01196961

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