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A Further step towards three-dimensional elemental analysis of solids

Ein weiterer Schritt zur dreidimensionalen Elementaranalyse von Festkörpern

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Summary

Three-dimensional constitutional analysis of solid samples has been performed by using a computerized scanning ion-microprobe. Elemental ion currents are stored in each voxel of a three-dimensional scene. Rearranging of voxel data by the computer allows convenient display of three-dimensional data on two-dimensional display media. A particularly useful display mode is the “transaxial projection”, allowing depth distribution and lateral distribution of an element to be displayed in the same digital image. The inherent resolution limits of this three-dimensional method make it particularly useful in the analysis of microelectronic devices.

Zusammenfassung

Eine Methode zur dreidimensionalen konstitutionellen Mikroanalyse von Festkörpern wurde beschrieben. In einer computerisierten Ionenmikrosonde werden die Sekundärionenströme in jedem „Voxel“ eines dreidimensionalen Gitters gespeichert, während die Probe vom Primärionenstrahl zerstäubt wird. Durch Umordnen von „Voxel“-Daten kann Information über die dreidimensionale Elementverteilung in geeigneter Weise auf einem Bildschirm dargestellt werden. In einer neuen Displaymethode, der „Transaxialen Projektion“, können Lateralverteilung und Tiefenverteilung eines Elementes in einem Festkörper im gleichen digitalen Bild dargestellt werden.

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Authors and Affiliations

  1. Austrian Research Center Seibersdorf, Austria

    F. G. Rüdenauer & W. Steiger

Authors
  1. F. G. Rüdenauer
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  2. W. Steiger
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Additional information

Dedicated to Prof. Dr. Hanns Malissa on the occasion of his 60th birthday.

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Rüdenauer, F.G., Steiger, W. A Further step towards three-dimensional elemental analysis of solids. Mikrochim Acta 76, 375–389 (1981). https://doi.org/10.1007/BF01196959

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  • DOI: https://doi.org/10.1007/BF01196959

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