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Co-sputtered Si-Cr resistive films

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Abstract

Si-Cr films of variable composition between pure silicon and pure chromium have been deposited by co-sputtering on to glass substrates and thermally oxidized silicon wafers. In order to assess the applications of the Si-Cr films to thin film resistors, the electrical characteristics of the films have been determined as a function of composition, thickness, thermal treatments, etc.

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References

  1. K. Hieber andR. Dittmann,Thin Solid Films 36 (1976) 357.

    Google Scholar 

  2. K. Hieber,ibid. 57 (1979) 353.

    Google Scholar 

  3. J. Denis, M. Fernández, J. P. González, J. M. Albella andJ. M. Martínez-Duart,ibid. 125 (1985) 329.

    Google Scholar 

  4. S. Schiller, U. Heising, K. Steinfelder andChr. Korndoerfer,ibid. 96 (1982) 279.

    Google Scholar 

  5. P. C. Karulkar,ibid. 121 (1984) 259.

    Google Scholar 

  6. S. P. Murarka, in “Silicides for VLSI Applications” (Academic, New York, 1983).

    Google Scholar 

  7. D. A. Robins,Philos. Mag. 3 (1958) 313.

    Google Scholar 

  8. R. K. Waits,J. Vac. Sci. Technol. 6 (1969) 308.

    Google Scholar 

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Authors and Affiliations

  1. Instituto Fisica del Estado Sólido, CSIC and Dept. Fisica Aplicada, C-12, Universidad Autónoma, Cantoblanco, 28049, Madrid, Spain

    M. Fernández, J. P. González, J. M. Albella & J. M. Martínez-Duart

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  1. M. Fernández
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  2. J. P. González
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  3. J. M. Albella
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  4. J. M. Martínez-Duart
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Fernández, M., González, J.P., Albella, J.M. et al. Co-sputtered Si-Cr resistive films. J Mater Sci 22, 3703–3706 (1987). https://doi.org/10.1007/BF01161481

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  • DOI: https://doi.org/10.1007/BF01161481

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