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Evaporation characteristics of TeO2 in the formation of tellurium oxide thin films

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Abstract

Thin films of tellurium oxide have been formed by evaporating TeO2 with different boat materials (molybdenum and tantalum) in a high vacuum and at different oxygen partial pressures. The optical and structural properties of the films have been studied. From the variations in the properties with respect to the formation conditions the evaporation characteristics of TeO2 have been discussed.

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Lakshminarayan, N., Radhakrishnan, M. & Balasubramanian, C. Evaporation characteristics of TeO2 in the formation of tellurium oxide thin films. J Mater Sci 21, 246–250 (1986). https://doi.org/10.1007/BF01144728

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  • DOI: https://doi.org/10.1007/BF01144728

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