Abstract
The first part of this review surveys the forms of energy exchange between incident ions and target atoms, going on to an examination of the distribution in depth of deposited energy. This analysis is then used to interpret the sputtering yield under various circumstances. The last part of the paper is devoted to a survey of different forms of radiation damage in sputtered targets, with special reference to the many factors that modify the original composition profile: such modification is related to the bombardment conditions used in analytical techniques such as AES, ESCA or SIMS which may be used,inter alia, to determine composition profiles.
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References
“Material Characterization using Ion Beams”, published in NATO Advanced Study Institute Series 28, edited by J. P. Thomas and A. Cachard (Plenum Press, London and New York, 1978).
P. Sigmund, “Inelastic Ion-Surface Collisions”, edited by N. H. Tolk (Academic Press Inc., New York, 1977) p. 121.
J. Lindhard, M. Scharff andM. E. Schiott,Kgl. Danska Videnskab. Selskab. Mat. Phys. Medd. 33 (1963).
J. Lindhard, V. Nielsen andM. Scharff,ibid. 36 (1968).
J. B. Sanders, Thesis, University of Leiden (1968).
Idem, Can, J. Phys.46 (1968) 455.
P. Sigmund,Phys. Rev. 184 (1969) 383.
Idem. Rev. Roum. Phys. 17 (1972) 823.
Idem, “Sputtering yield of ion bombarded Solids”, Third National Conference on Atomic Collision in Solids, Kiev, USSR, October 1974.
Idem, in “Radiation Damage Processes in Materials”, published in NATO Advanced Study Institute Series, edited by C. H. S. Dupuy (Noordhoff International Publishing, Leyden, Netherland, 1974).
Chr. Lehmann, “Interaction of Radiations with Solids and Elementary Defects Production”, edited by S. Amelinckx, R. Gevers and J. Nihoul, Series of books “ Defects in Crystalline Solids”,10, (North Holland Publishing Company, Amsterdam, 1975).
G. Carter andJ. S. Colligon, “Ion Bombardment of Solids” (Elsevier Publishing Company Inc., New York, 1968).
D. E. Almen andG. Bruce,Nucl. Instrum. Methods 11 (1961) 279.
W. Jäger,J. Microsc. Spectrosc. Electron. 6 (1981) 437.
R. Kelly, “Collisional, thermal and electronic sputtering”, in Proceedings of the International Conference on Ion Beam Modification of Materials, Budapest (1978), published in the journalNucl. Instrum. Methods.
B. J. Garrison, N. Winograd andD. E. Harrison,J. Chem. Phys. (1978).
D. E. Harrison, B. J. Garrison andN. Winograd, in Proceedings of the Second International Conference on S.I.M.S., Stanford, California (1979), book published in “Springer Series in Chemical Physics”9, (Springer Verlag, Berlin, Heidelberg, New York, 1979) p. 12.
K. Kanaya, K. Hosou, K. Koga andK. Toki,Jpn. J. Appl. Phys. 12 (1973) 1297.
P. Sigmund, A. Oliva andG. Falcone, in Proceedings of the Ninth International Conference on Atomic Collisions in Solids, Lyon, France (1981), published in the journalNucl. Instrum. Methods (1982).
P. Sigmund, in “Sputtering by Particle Bombardment”, edited by R. Behrisch, Series of books “Topics in Applied Physics” 47, (Springer Verlag, Berlin, Heidelberg, New York, 1981) p. 9.
N. Andersen andP. Sigmund,Mat. Fys. Medd. Dann. Via. Selsk. 39, (1974).
D. E. Harrison andC. B. Delaplain,J. Appl. Phys. 47 (1976) 2252.
M. T. Robinson andI. M. Torrens,Phys. Rev. 9 (1974) 5008.
T. Ishitani, K. Murata andR. Shimizu,Jpn. J. Appl. Phys. 10 (1971) 1464.
S. T. Kang, R. Shimizu andT. Okutani ibid. 18 (1979) 1717.
M. L. Roush andT. D. Andreadis,Rad. Eff. 55 (1981) 119.
W. L. Patterson andG. A. Shirn,J. Vac. Sci. Technol. 4 (1967) 343.
N. J. Chou andM. W. Shafer,Surf. Sci. 92 (1980) 601.
H. F. Winters andJ. W. Coburn,Appl Phys. Lett. 28 (1976) 176.
J. J. Jimenez-Rodriguez, M. Rodriguez-Vidal andJ. A. Valles-Abarca,Rad. Eff. 41 (1979) 165.
H. L. Bay, H. H. Andersen, W. O. Hofer andO. Nielsen,Nucl. Instrum. Methods 132 (1976) 301.
M. O. Ruault, H. Bernas andJ. Chaumont,Phil. Mag. A. 39 (1979) 757.
M. W. Thompson, “Defects and Radiation Damages in Metals” (Cambridge University Press, 1969) p. 196.
M. Szymonski andA. E. deVries,Phys. Lett. 63A (1977) 359.
M. Szymonski, H. Overeijnder, A. Haring andA. E. deVries,Rad. Eff. 36 (1978) 189.
Idem, ibid. 37 (1978) 205.
H. H. Andersen andH. L. Bay,J. Appl. Phys. 45 (1974) 953.
R. Kelly,Rad. Eff. 32 (1977) 91.
Idem, Nucl. Instrum. Methods 149 (1978) 553.
R. J. Colton, J. S. Murday, J. R. Wyatt andJ. J. De Corpo, in Proceedings of the 26th Annual Conference on Mass Spectrometry and Allied Topics (American Society for Mass Spectrometry, 1978).
A. Benninghoven andW. K. Sichtermann,Anal. Chem. 50 (1978) 1180.
P. K. Haff,Appl. Phys. Lett. 31 (1977) 259.
H. H. Andersen andH. L. Bay,Rad. Eff. 13 (1972) 67.
Idem, ibid. 19 (1973) 139.
D. Rosenberg andG. K. Wehner,J. Appl Phys. 33 (1962) 1842.
A. E. Morgan, H. A. M. deGrefte, H. J. Tolle, N. Warmoltz andH. W. Werner,Appl. Surf. Sci. 7 (1981) 372.
J. C. Pivin, C. Roques-Carmes andG. Slodzian,Int. J. Mass. Spectrom. Ion Phys. 31 (1979) 293.
H. H. Andersen, “The Depth Resolution of Sputter Profiling”, in Proceedings of the 3rd Iternational Conference on Solid Surfaces, Vienna, 1977 (International Union for Vacuum Science, Technique and Application) (see alsoAppl. Phys. 18 (1979) 131).
K. Kanaya,Jpn. J. Appl. Phys. 12 (1973) 1297.
D. N. Siedman,J. Phys. F 3 (1973) 393.
M. Wilkens, In “Application of Ion Beams to Metals”, edited by S. T. Picraux (Plenum Press, New York, 1975) p. 441.
K. L. Merkle, “Radiation Damages in Metals”, edited by N. L. Peterson, (American Society of Metals, Metals Park Ohio, 1976) p. 58.
M. L. Jenkis, K. H. Katerbau andH. Wilkens,Phil. Mag. 34 (1976) 1141.
L. E. Thomas, T. Schober andR. W. Balluffi,Rad. Eff. 1 (1979) 157.
D. I. R. Norris,Phil. Mag. 19 (1969) 527.
M. O. Ruault, in “Application of Ion Beams to Metals”, edited by S. T. Picraux, (Plenum Press, New York, 1973) p. 459.
Idem, Phys. Rev. Lett. 36 (1976) 1148.
Idem, Thèse d'Etat, Université Paris-Sud, Orsay, France (1975).
R. S. Nelson andD. J. Mazey,Rad. Eff. 18 (1973) 127.
A. Bourret andD. Dautreppe,Phys. Status Solidi 29 (1968) 283.
F. Haüssermann,Phil. Mag. 25 (1972) 537.
E. Johnson andJ. A. Ytterhus,ibid. 28 (1973) 489.
E. C. Baranova,Rad. Eff. 18 (1973) 21.
H. M. Naguib andR. Kelly,ibid. 25 (1975) 1.
A. Benninghoven,Z. Phys. 230 (1970) 403.
S. Hofmann,Mikrochim. Acta Suppl. 7 (1977) 109.
Idem, Appl. Phys. 9 (1976) 59.
R. S. Gvosdover, V. M. Efremenkova, L. B. Shelyakin andV. E. Yurasova,Rad. Eff. 27 (1976) 237.
G. W. Lewis, G. Carter, M. J. Nobes andS. A. Cruz,Rad. Eff. Lett. 58 (1981) 119.
O. Lyon, Thèse de 3ème Cycle, Université Paris-Sud, Orsay, France (1974).
M. C. Montlouis, Thèse de 3ème Cycle, Université Paris-Sud, Orsay, France (1979).
G. Blaise, O. Lyon andC. Roques-Carmes,Surf. Sci 71 (1978) 630.
C. Cohen, A. V. Drigo, H. Bernas, J. Chaumont, K. Krolas andL. Thome,Phys. Rev. Lett. 48 (1982) 1193.
M. M. Tochic, A. V. Drigo, C. Cohen, L. Thome, J. Chaumont andH. Bernas in Proceedings of the International Conference on Ion Beam Modification of Materials, 1980, published in the journalNucl. Instrum. Methods 182–183 (1981) 303.
E. Giani, D. K. Murti andR. Kelly, in Proceedings of the Symposium on “Thin Film Phenomena. Interfaces and Interactions”, published inJ. Electrochem. Soc. 78 (1978) 443.
G. Carter, D. G. Armour, D. C. Ingram, R. Webb andR. Newcombe,Rad. Eff. Lett. 43 (1979) 233.
J. L. Seran, Thèse d'Etat, Université Paris-Sud, Orsay, France (1978).
H. H. Andersen, “The Depth Resolution of Sputter Profiling”, in 3rd International Conference on Solid Surfaces, Vienna, September 1977.
R. Grotzchel et al. Rad. Eff. 27 (1976) 237.
J. W. Coburn,J. Vac. Sci. Technol. 13 (1976) 1037.
F. Schultz, K. Wittmaack andJ. Maul,Rad. Eff. 18 (1973) 211.
P. Sigmund,J. Appl. Phys. 50 (1979) 7261.
M. R. Williams,Rad. Eff. 59 (1981) 47.
Z. L. Liau, W. L. Brown, R. Homer andJ. M. Poate,Appl. Phys. Lett. 30 (1977) 626.
Z. L. Liau, J. W. Mayer, W. L. Brown andJ. M. Poate,J. Appl. Phys. 49 (1978) 5295.
P. S. Ho, J. E. Lewis, H. S. Wildman andJ. K. Howard,Surf. Sci. 57 (1976) 383.
E. Gillam,J. Phys. Chem. Solids 11 (1959) 55.
M. L. Tarng andG. K. Wehner,J. Appl. Phys. 42 (1971) 2449.
H. Shimizu, M. Ono andN. Nakayama,Surf. Sci. 36 (1973) 817.
W. Färber, G. Betz andP. Braun,Nucl. Instrum. Methods 132 (1976) 351.
G. S. Anderson,J. Appl. Phys. 40 (1969) 2884.
H. F. Winters andJ. W. Coburn,Appl Phys. Lett. 28 (1976) 176.
D. T. Quinto, V. S. Sundaram andW. D. Robertson,Surf. Sci. 28 (1971) 504.
W. T. Ogar, N. T. Olson andH. P. Smith,J. Appl. Phys. 40 (1969) 4997.
W. K. Chu, J. K. Howard andR. F. Lever,ibid. 47 (1976) 4500.
J. E. Hobbs andA. D. Marwick,Rad. Eff. Lett. 58 (1981) 83.
H. J. Mathieu,J. Vac. Sci. Technol. 14 (1977) 1023.
Y. Al. Jammal, D. Pooney andP. D. Townsend,J. Phys. C6 (1973) 247.
P. H. Holloway,J. Elect. Spectrosc. 7 (1975) 215.
D. Aberdam, in “Journées d'Etude sur la Spectrométrie Auger”, (1979), published as a special number of the journal “Le Vide, les Couches Minces”, (Société Française du Vide, Paris, 1979), 73.
H. J. Mathieu, D. E. McClure andD. Landolt,Thin Solid Films 38 (1976) 281.
J. C. Pivin andG. Dufour, unpublished work (1982).
J. B. Malherbe, J. M. Sanz andS. Hofmann,Surf. Interface Anal. 3 (1981) 235.
D. Loison, J. C. Pivin, J. Chaumont andC. Roques-Carmes, in Proceedings of the Conference on Ion Modification of Materials, Grenoble, France, 1982, to be published in the journalNucl. Instrum. Methods (1983).
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Pivin, J.C. An overview of ion sputtering physics and practical implications. J Mater Sci 18, 1267–1290 (1983). https://doi.org/10.1007/BF01111944
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DOI: https://doi.org/10.1007/BF01111944