Abstract
The results are presented of a mathematical modeling of the excitation, by unmodulated laser radiation, of resonance oscillations in silicon micromechanical structures.
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Additional information
Translated from Izmeritel'naya Tekhnika, No. 11, pp. 20–21, November, 1995.
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Kuzin, A.Y. Method for exciting fiber-optic resonance sensors. Meas Tech 38, 1233–1236 (1995). https://doi.org/10.1007/BF00986594
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DOI: https://doi.org/10.1007/BF00986594