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SEM Measurement of the linear dimensions of relief submicron structures by the method of “invariant” points

  • Linear and Angular Measurements
  • Published:
Measurement Techniques Aims and scope

Abstract

The Monte Carlo method is used to simulate video signals from a scanning electron microscope in backscattered electrons from slit-like structures with a rectangular profile and widths of 0.1, 0.5, and 4.0 μm.

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Authors
  1. V. A. Danilov
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  2. Yu. A. Novikov
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  3. A. V. Rakov
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  4. I. Yu. Stekolin
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Additional information

Translated from Izmeritel'naya Tekhnika, No. 8, pp. 22–23, August, 1995.

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Danilov, V.A., Novikov, Y.A., Rakov, A.V. et al. SEM Measurement of the linear dimensions of relief submicron structures by the method of “invariant” points. Meas Tech 38, 876–879 (1995). https://doi.org/10.1007/BF00978387

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  • DOI: https://doi.org/10.1007/BF00978387

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