Abstract
The sputtering characteristics of KCl and NaCl alkali halide single crystals by bombardment with argon and mercury atoms are investigated. The sputtering coefficients are measured in the energy range 0.5–3 keV. Anisotropy is found in sputtering at various incident angles of the beam. The yield of charged particles during bombardment of thin specimens (of the order of 8–20 μm) of KCl single crystals is investigated.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 7, pp. 55–59, July, 1984.
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Sena, L.A., Barskaya, A.Y., Varshavskii, S.P. et al. Bombardment of alkali halide crystals with medium-energy atoms. Soviet Physics Journal 27, 590–593 (1984). https://doi.org/10.1007/BF00897454
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DOI: https://doi.org/10.1007/BF00897454