Abstract
An analysis is made of the relation between the thermodepolarization charge (QTSD), the variation in the effective charge of an MIS structure during thermodepolarization (ΔQSS), and the total moving charge (Qo). The effect of the fixed charge on the character of the moving-charge flow is shown. It is noted that the evaluation of Qo from the magnitude of the thermodepolarization charge is not unique.
Similar content being viewed by others
Literature cited
J. Lindmayer, J. Appl. Phys.,36, 196 (1965).
H. J. Wintle, J. Appl. Phys.,42, 4724 (1971).
J. G. Simmons and G. W. Taylor, Phys. Rev.,B6, 4793 (1972).
J. G. Simons and G. W. Taylor, Phys. Rev.,B6, 4804 (1972).
B. Gross, J. Phys. D: Appl. Phys.,7, L 103 (1974).
B. Gross et al., Phys. Rev.,9, 5318 (1974).
Yu. A. Gorokhovat-skii, A. N. Rodionov, and V. I. Zhdanok, Izv. Akad. Nauk Latv. SSR, Ser. Fiz.-Tekh. Nauk,2, 21 (1976).
Yu. G. Sadof'ev, in: Physics of Semiconductors and Microelectronics [in Russian], No. 2, Ryazan' (1976), p. 60.
Yu. G. Sadof'ev, in: Methods of Studying MIS Structures and Physical Aspects of the Technology of MIS Integrated Circuits [in Russian], Znanie, Kiev (1976), p, 44.
T. A. Cowell and G. Woods, Brit. J. Appl. Phys.,18, 1045 (1967).
Yu. A. Gorokhovat-skii, Izv. Akad. Nauk Latv. SSR, Ser, Fiz.Tekh. Nauk,3, 15 (1972).
Author information
Authors and Affiliations
Additional information
Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika. No. 3. pp. 66–70, March, 1978.
Rights and permissions
About this article
Cite this article
Sadof'ev, Y.G. The thermodepolarization charge and the variation of effective charge in an MIS structure with two ohmic electrodes. Soviet Physics Journal 21, 323–327 (1978). https://doi.org/10.1007/BF00894726
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF00894726