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Heating of thin films by laser radiation with allowance for the temperature dependence of the reflection coefficient

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Abstract

We solve the thermophysical problem of the heating of thin metal films on semiconductor substrates by laser radiation for linear and stepwise changes of the absorptivity as a function of the surface temperature.

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Authors and Affiliations

  1. Belorussian Polytechnic Institute, USSR

    S. N. Kapel'yan & Yu. F. Morgun

  2. Institute of Electronics, Academy of Sciences of the Belorussian SSR, Minsk

    S. N. Kapel'yan & Yu. F. Morgun

Authors
  1. S. N. Kapel'yan
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  2. Yu. F. Morgun
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Additional information

Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 47, No. 4, pp. 642–647, October, 1984.

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Kapel'yan, S.N., Morgun, Y.F. Heating of thin films by laser radiation with allowance for the temperature dependence of the reflection coefficient. Journal of Engineering Physics 47, 1217–1221 (1984). https://doi.org/10.1007/BF00869921

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  • DOI: https://doi.org/10.1007/BF00869921

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