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Statistical modeling of the film-coating process in a vacuum

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Journal of engineering physics Aims and scope

Abstract

We describe the application of the method of statistical modeling through the use of an electronic digital computer to solve the problem of the distribution of film thickness for various geometric and physical parameters in the elements of a deposition system.

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Literature cited

  1. N. P. Buslenko and Yu. Shreider, The method of Statistical Testing [in Russian], Fizmatgiz (1961).

  2. L. I. Kalashnik, A. M. Kislov, and É. M. Livshits, Inzhen.-Fiz. Zh.,13, No. 6 (1967).

  3. L. Holland, The Coating of Thin Films in a Vacuum [Russian translation], Gosenergoizdat (1963).

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Authors and Affiliations

  1. Physicotechnical Institute of Low Temperatures, Academy of Sciences of the Ukrainian SSR, Khar'kov

    L. I. Kalashnik, A. M. Kislov & É. M. Livshits

Authors
  1. L. I. Kalashnik
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  2. A. M. Kislov
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  3. É. M. Livshits
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Additional information

Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 17, No. 1, pp. 140–144, July, 1969.

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Kalashnik, L.I., Kislov, A.M. & Livshits, É.M. Statistical modeling of the film-coating process in a vacuum. Journal of Engineering Physics 17, 890–893 (1969). https://doi.org/10.1007/BF00828400

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  • DOI: https://doi.org/10.1007/BF00828400

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