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Parameters of high-frequency vacuum breakdown in a mass-spectrometer ion source

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Abstract

The electrical and optical characteristics of hf vacuum breakdown are experimentally investigated. It is shown that the breakdown current amplitude can reach 20 A with a voltage of up to 30 kV on the electrodes and a discharge duration of 20–25 nsec.

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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 42, No. 4, pp. 645–648, April, 1982.

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Gal'burt, V.A., Zelenin, A.E. & Sikharulidze, G.G. Parameters of high-frequency vacuum breakdown in a mass-spectrometer ion source. Journal of Engineering Physics 42, 450–452 (1982). https://doi.org/10.1007/BF00826851

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  • DOI: https://doi.org/10.1007/BF00826851

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